US20220100078A1: Devices and methods for variable etch depths
Published in US Patent, 2022
Recommended citation: M. A. Zeeshan, R. Bandy, P. F. Kurunczi, S. Kallakuri*, T. Soldi, J. C. Olson. 2022. "Devices and methods for variable etch depths." US Patent. US20220100078A1 /files/pdf/patents/US20220100078A1.pdf
